“Long-term stability of supply equipment is key for molybdenum deposition”… Merck addresses next-generation processes with CHEMKEEPER®

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“Long-term stability of supply equipment is key for molybdenum deposition”… Merck addresses next-generation processes with CHEMKEEPER®

Published2026.07.24 12:47

During a webinar jointly conducted by SEMI and Merck, Dr. Benjamin Garrett of Merck presented on "Game Changers in Deposition Processes: Molybdenum Next-Generation Process Materials and Advanced Supply Systems," arguing that molybdenum dioxydichloride precursor (MoO₂Cl₂) and the CHEMKEEPER® supply system will become "game changers" in deposition processes. As molybdenum (Mo) gains attention as a next-generation material in semiconductor deposition processes, the importance of precursor purity and delivery systems for stable supply in production environments is increasing.

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