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[SEMICON Korea 2023] ZEISS Unveils Latest EUV Photomask and 3D Analysis Solutions at SEMICON

기사입력2023.02.01 11:42


▲ZEISS Korea Semicon Korea 2023 booth overview

ZEISS Korea, German optical technology-based semiconductor solution leader
Tour of Innovation Center in parallel with activities to recruit excellent talent
ZEISS Korea participated in 'SEMICON Korea 2023', a global semiconductor industry exhibition, and showcased its latest semiconductor equipment technology by introducing its main promoted equipment, the AIMS EUV 3.0 equipment and the repair equipment, the MeRiT LE equipment.

German semiconductor materials company ZEISS Korea participated in 'SEMICON Korea 2023' held from February 1st to 3rd and showcased various solutions.

At this year's 'SEMICON Korea 2023', ZEISS Korea presented the 'AIMS (Aerial Imaging Measurement System) EUV', an actinic mask measurement system as a photomask solution utilized in the latest EUV technology of the Semiconductor Mask Division (SMS), and the '3D Tomography (tomography) metrology equipment' of the Semiconductor Process Control Division (PCS).

AIMS EUV uses proven Aerial Image technology to verify EUV photomasks and supports the EUV AutoAnalysis software package to improve the performance of image analysis and data processing automation. Helps.

3D Tomography metrology equipment produces each single layer using a FIB (Focused Ion Beam) and images it using a SEM (Scanning Electron Microscope), reassembles it into three dimensions, and supports sampling, analysis, measurement, and verification of semiconductor patterns with nanometer accuracy from the reassembled images.

The Microscope Division (RMS) introduced the 'ZEISS GeminiSEM', a scanning electron microscope for high-resolution imaging and characterization with a variety of applications, and the 'ZEISS Crossbeam', which can provide 3D analysis and samples of advanced semiconductor materials and packaging.

In addition, the 'ZEISS Metrotom', a 3D X-ray CT device from the Quality Solutions Division (IQS), was also introduced.

In addition, ZEISS Korea plans to carry out activities to recruit excellent talents in the field. At the ZEISS Korea booth (D530), the HR team and field engineers provided information on opportunities to grow as engineers at ZEISS Korea and recruitment for 2023. We conducted a campus tour of the ZEISS Innovation Center located in Dongtan, Gyeonggi-do for students who visited the booth, allowing them to experience various ZEISS solutions firsthand.

“We are delighted to be able to showcase ZEISS’s latest technologies at SEMICON Korea, the largest semiconductor event held in Korea,” said Jeong-Hyeon Seok, CEO of ZEISS Korea. “ZEISS is a company that provides various solutions required for the semiconductor industry, and through this event, we will build stronger partnerships with various customers in Korea.”

Meanwhile, ZEISS Korea is a leading German optics company with a 176-year history that began with the microscopes of its founder, Carl Zeiss. It possesses EUV optical lens modules, a key component of ASML EUV (extreme ultraviolet) lithography, which is attracting attention in the semiconductor field, as well as various solutions.

▲ZEISS AIMS EUV (Photo: ZEISS Korea)