Daikin Korea showcased its world-leading F series technology by introducing fluorine products and etching gases for semiconductors at SEMICON Korea 2023.

Daikin Korea participated in 'SEMICON Korea 2023' held at COEX in Samseong-dong from the 1st to the 3rd.

At this exhibition, Daikin exhibited F (fluorine)-related products such as fluororesin-related products, fluororesin paints, and etching gas.

Etching gases introduced included CH2F2, C4F8, COS, Low GWP 1, Low GWP 2 produced at the Dangjin plant in Korea, CF4, CHF3 produced at the Osaka plant, and C4F6 produced in China.

Regarding etching gas, Daikin consistently produces everything from raw materials to finished products within the group and possesses a wealth of catalyst synthesis technology. We also have technology to evaluate the etching performance of many fluorine compounds.

In addition, this exhibition showcased fluorine products such as etching agents, tanks, wafer carriers, tubes, rings required for manufacturing processes and piping systems, and infrastructure materials utilizing fluorine products.

In addition, we actively responded to the issue of global warming by introducing fluorine-based solvents with excellent environmental performance, such as zero ozone depletion potential and low GWP.