
▲ (From left) Katherine Dei Cas, Global Head and Senior Vice President of Delivery Systems and Services at Merck Electronics, and Kim Woo-kyu, CEO of Merck Korea
Next-generation material replacing tungsten and copper first applied in 3D NAND wordline process
CVD·ALD MoO₂Cl₂ highest purity production combined with the CHEMKEEPER® delivery system
Global science and technology company Merck has selected molybdenum as a strategic new semiconductor material for the AI era and is beginning full-scale supply.
Merck announced its semiconductor materials and semiconductor supply strategy at a press conference on the 10th.
Katherine Dei Cas, Global Head and Senior Vice President of Merck Electronics’ Delivery Systems and Services business unit, and Kim Woo-kyu, CEO of Merck Korea, personally attended the event and revealed Merck’s core strategies.
“AI semiconductors have completely different requirements than conventional semiconductors. They simultaneously require higher computational performance, lower power consumption, and much more complex chip structures.” Catherine Day Cass, Senior Vice President, stated, “AI semiconductors have entirely different requirements from existing semiconductors. “Semiconductor processes have already become extremely complex, ranging from Gate-All-Around (GAA), high-density DRAM, 3D NAND, and HBM to advanced packaging, and there are limits to performance improvement through simple process miniaturization alone,” the company stated. “In this situation, Merck has determined that material innovation is the key to the advancement of semiconductor technology. Accordingly, Merck is putting forward an integrated solution strategy that combines materials, equipment, measurement, and inspection, rather than supplying materials alone.”
Katherine Dei Cas, Global Head and Senior Vice President of Delivery Systems and Services at Merck Electronics He added, “The most notable keyword in Merck’s semiconductor materials strategy is molybdenum (Mo).” “Molybdenum is a next-generation metal material that can replace the widely used tungsten (W) and copper (Cu), providing lower resistance and excellent electrical conductivity,” they said.
He also said, “We expect molybdenum to be first applied in earnest in the 3D NAND wordline process, and subsequently expand its scope of use to logic semiconductors and DRAM,” adding, “In particular, in structures requiring high integration and high-speed signal processing, such as AI semiconductors, the physical properties of molybdenum become a decisive competitive advantage.”
What differentiates Merck's strategy from its competitors is not the materials themselves.
Merck produces molybdenum precursors (MoO₂Cl₂) for CVD and ALD processes with the highest purity and provides them in combination with the CHEMKEEPER® delivery system.
This system is designed to increase material usage efficiency to over 99% and can maintain high operating rates and stability even in mass production environments.
This means that from the client's perspective, they can simultaneously achieve two benefits: improved yield and reduced total cost of ownership (TCO).
In markets where production scale is growing rapidly, such as AI semiconductors, these factors become a competitive advantage.
“Merck views speed and supply stability as paramount in the competition for AI semiconductors. To this end, Merck is actively investing in the localization of its molybdenum solution supply chain.” "The manufacturing of molybdenum compounds is being localized at the plant in Eumseong, North Chungcheong Province, and the delivery system is being produced at the Ansan plant," they stated.
Kim Woo-kyu, CEO of Merck Korea, continued, “Merck has already invested over 220 million euros in Korea, and most of the additional investment plan worth 600 million euros announced in 2021 has already been executed. Through this, Korea is establishing itself as a key hub connecting the entire world beyond Asia in Merck’s global semiconductor materials strategy.” He added, “Merck’s semiconductor strategy does not stop at materials. By acquiring the metrology and inspection company Unity-SC in 2024, Merck has expanded its business into the areas of wafer characterization and yield management. This signifies that we have completed a structure capable of simultaneously managing the quality and productivity of the semiconductor manufacturing process.” "In addition, starting from the second half of 2025, a dedicated team for Korea has been formed to support advanced packaging and heterogeneous integration technologies, which is considered a strategy to strengthen technological competitiveness essential for the AI semiconductor era," he mentioned.

▲ Kim Woo-kyu, CEO of Merck Korea
Meanwhile, at Semicon Korea 2026, Merck showcased its AI-based Materials Intelligence™ solution and comprehensive semiconductor materials portfolio under the theme "The Next Big Thing Starts with Us."
Through this exhibition, Merck conveyed the message that competitiveness in the era of AI semiconductors is not achieved through process miniaturization alone, but requires the combined capabilities of materials, supply chains, and integrated solutions.
Merck's materials strategy, centered on molybdenum, can be viewed as an attempt to transform the very structure of the semiconductor industry, going beyond the mere development of new materials. As long as the demand for AI continues to rise, this strategy chosen by Merck is highly likely to become a significant benchmark for the semiconductor industry in the future.