The government is simplifying the procedures for introducing EUV (Extreme Ultraviolet) lithography equipment, a key component of semiconductor manufacturing. As a result, inspection periods are expected to be significantly reduced, leading to anticipated changes in the schedules for establishing semiconductor production lines.

The Ministry of Trade, Industry and Energy announced on the 2nd that a partial amendment to the Enforcement Decree of the High-Pressure Gas Safety Management Act was approved at a Cabinet meeting. This amendment contains provisions to adjust safety management standards for semiconductor manufacturing equipment.

EUV equipment is a core facility for forming microcircuits in the semiconductor manufacturing process. Previously, it was classified as a 'high-pressure gas manufacturing facility' because it contained high-pressure gas equipment.

As a result, it took a total of 34 days to go through procedures such as technical review, approval, intermediate inspection, and final inspection.

The amendment changed the classification of EUV equipment to 'specific equipment.' As a result, only the technical review, licensing, and final inspection procedures apply, reducing the inspection period to approximately nine days.

The Ministry of Industry announced that the elimination of intermediate inspections is expected to result in cost savings of approximately 500 million won per piece of equipment.

EUV equipment is semiconductor process equipment that uses extreme ultraviolet rays with a wavelength of 13.5 nm to draw circuits on wafers. It contains a high-pressure gas device internally and has previously been treated as factory equipment.

The government explained that it adjusted the classification criteria after reviewing consistency with global safety standards and reflecting industry opinions. The plan is to convert them to specific facilities while maintaining the same level of safety as before through measures such as three-year factory audits and comprehensive process inspections.

This amendment also includes additional regulatory improvements. Key contents include the establishment of inspection standards for cleaning facilities using carbon dioxide and the relaxation of standards for appointing safety managers for high-pressure gas facilities.

The Ministry of Trade, Industry and Energy announced that the amendment is scheduled to take effect immediately after promulgation.