SK Hynix and Microceramics have joined hands in the technology development, performance evaluation, and purchase of high-temperature heaters for semiconductor CVD equipment.

SK Hynix and Microceramics signed a ‘Business Agreement on High-Temperature Heaters for Semiconductor CVD Equipment’ at Microceramics’ headquarters on the 28th.

The two companies, with the common recognition that close cooperation between demand and supply companies is essential for strengthening the competitiveness of the domestic materials, parts, and equipment industries and for technological independence, promised to do their best to cooperate in technology development, performance evaluation, and purchase of high-temperature heaters for semiconductor CVD equipment.

High-temperature heaters for semiconductor CVD equipment are key components required for semiconductor deposition process equipment. Their role is to maintain silicon wafers at a uniform high temperature (over 550°C) so that silane-based deposition materials can be uniformly deposited.

Miko Ceramics is a company that was spun off from Miko in 2020 to specialize in the semiconductor equipment parts business, and manufactures ceramic heaters, electrostatic chucks (ESCs), and consumable ceramic parts for semiconductor equipment.It is a company that possesses technology specialized in the production of products such as:

Recently, Japan succeeded in developing a 'high-temperature heater for semiconductor CVD equipment', an item that accounts for more than 95% of the global market, and is currently investing 42 billion won to build a new factory capable of producing 3,000 units per year. This is expected to secure a domestic supply base for items that had previously been dependent on imports, and it is also expected that overseas exports will become possible.

Minister of Trade, Industry and Energy Sung Yun-mo, who attended the business agreement signing ceremony, said, “I hope that solidarity and cooperation movements such as today’s business agreement will spread throughout our small business industry ecosystem and lead to the growth of the small business industry and, further, our manufacturing industry.”