한국표준과학연구원(KRISS)이 ‘2023년 가스분석측정클럽 워크숍’을 통해 글로벌 에너지 패러다임 동향을 살펴보고, 반도체용 특수가스의 종류 및 불순물 분석에 대한 기술 동향을 공유했다.
Gas Analysis and Measurement Club Workshop, Energy Paradigm Trends Topic
Announcement of ammonia cracking technology for commercialization of clean hydrogen
A forum was set up to examine global energy paradigm trends and share technological trends in types of special gases for semiconductors and impurity analysis.
The Korea Research Institute of Standards and Science (KRISS) held the '2023 Gas Analysis and Measurement Club Workshop' at the Ocean Suites Jeju Hotel from September 7th to 8th.

▲Lee Sang-il, head of the Chemical and Bio Standards Division at the Korea Research Institute of Standards and Science, is giving a welcoming speech.
In this workshop, under the theme of 'Energy Paradigm Trends', we shared the trends in clean energy such as green ammonia, liquid hydrogen, and hydrogen cars, as well as the purity analysis method of special gases for semiconductors in the semiconductor session.
In addition, there was also an opportunity to introduce and present the Industrial Gas Manufacturers, Korea Specialty Gas Industry Association, Korea High-Pressure Gas Industry Cooperative, and Korea Medical High-Pressure Gas Association.
In relation to climate change, clean hydrogen that does not emit carbon is emerging as a fuel.
Until now, hydrogen has been produced and used in each region, but it is expected that trade between countries will become active in the future, and accordingly, compliance with the clean address standards established by each country is expected to be of the utmost importance.
Our country's clean hydrogen certification standard is 4㎏CO2/㎏H2, but Japan and Europe apply stricter standards than our country. Caution is required in future international transactions.
According to Deloitte's forecast, clean hydrogen is expected to account for about 10% of total energy consumption in 2050, but by 2021, more than 95% of hydrogen production will be gray hydrogen, requiring significant investment in infrastructure and technology development for clean hydrogen production.
Ammonia is expected to play a large role in clean hydrogen in the future, as the existing hydrogen production method, the Steam Methane Reforming (SMR) process, and the ammonia cracking process are similar in terms of operation method and operating know-how, although they differ in process composition and reaction temperature.
Additionally, the hydrogen produced by ammonia cracking is more than twice that of the SMR process, and has the advantage of no CO2 emissions.
In particular, ammonia cracking is known to have secured commercialization technology, so it is expected to be commercialized more quickly than water electrolysis, which is less economical.
In addition, information on liquefied hydrogen and hydrogen cars was shared.
In the special gas session for semiconductors, the method of analyzing impurities in special gases for semiconductors and the trend of BSGS technology, as well as the methodology of developing technology for analyzing impurities in special gases for semiconductors using GC, were presented.
In the case of high-purity special gases, many are manufactured and distributed overseas, including in Japan and China, as well as domestically. Therefore, accurate purity analysis is essential to maintain consistency in the special gases used in the process.
Accordingly, semiconductor specialty gas suppliers are equipped with ultra-high purity specialty gas supply facilities that can stably store and supply high-risk gases in ultra-high flow rates at social distances from semiconductor production plants, and are conducting incoming and outgoing inspections using an online impurity monitoring analysis system.
In addition, the product is equipped with a safety device to automatically shut off and exhaust in case of an emergency.A gas supply system is required, and a building is usually constructed as a package including an ISO gas trailer and a high-flow gas panel connection, as well as the support equipment required to operate it.
In this seminar, GNL's People's Association Director and Dr. Oh Sang-hyeop of the Korea Institute of Standards and Technology shared gas analysis equipment and analysis methods for △SiH4 △NH3 △N2O △NF3 △CO2 △CF4 △HCL △H2 △N2 △HF △CHF3 △CH2F2 △C4F8.
Meanwhile, the Gas Analysis Standards Group of the Korea Research Institute of Standards and Science establishes measurement standards related to industrial high-pressure gases, toxic gases, greenhouse gases, fine dust, and gas isotope ratios, develops certified standard materials to promote measurement traceability, and provides measurement solutions for domestic and international regulated substances.
Major research achievements include: △Establishment of a purity analysis base for semiconductor gas materials, △Establishment of a measurement base for secondary nitrogen oxides, △Development of a mini-cylinder automatic measuring device, △Establishment of a purity analysis base for hydrogen for fuel cells, etc., and the institute is also actively working to establish a national measurement system for semiconductor gas materials.
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▲Attendees of the 2023 Gas Analysis and Measurement Club Workshop are taking a commemorative photo.