Blank mask prototype for ArF, mass production in the second half of the year
Government to support 1.2 trillion won in R&D of 80 small and medium-sized enterprises
More than 200 billion won invested in commercializing 100 small business items


SKC announced on the 20th that it is currently testing prototypes of high-end blank masks, including those for ArF, which depend on Japan for over 90%, with domestic demand companies and plans to begin full-scale mass production in the second half of the year.

Blank masks, which are manufactured by applying metal films, photosensitive films, etc. to quartz glass, are the original photomask plates before drawing circuit patterns. They are a key material in the semiconductor process and are among the top 20 key small and medium-sized items imported from Japan.

Blank masks are classified into KrF (krypton fluoride, 248 nm), ArF (argon fluoride, 193 nm), and EUV (extreme ultraviolet, 13.5 nm) depending on the wavelength of the light to be reacted, with ArF and EUV generally being high-end.

SKC has invested a total of 43 billion won since 2018 to complete a new blank mask factory at the end of 2019, and is currently developing a higher-level product than the current mass-produced item with the goal of mass production in 2021.

On the morning of the 20th, Vice Minister of Trade, Industry and Energy Jeong Seung-il visited SKC's blank mask factory in Cheonan to express his gratitude for the achievements of domestic production and announced the government's small and medium-sized business policy achievements.

Vice Minister Jeong said,“For the 20 major items, we are pushing forward as planned with the goal of securing stable supply in 2021 through expansion of domestic production, technological development, and diversification of import countries,” he said. “In particular, for the three items subject to Japan’s export restrictions on Korea, we will achieve complete supply stabilization within this year through factory expansion and foreign investment,” he said.

In addition, he said, “We are pursuing R&D support worth approximately 1.2 trillion won this year, focusing on the remaining 80 items,” and “We plan to secure basic supply stability through diversification of supply lines, etc.”

In addition, he said, “Close cooperation between the government and demand and supply companies is important for tangible changes such as strengthening the technological capabilities of small and medium-sized businesses and establishing a healthy industrial ecosystem,” and “To create early results, we plan to support the commercialization of 100 key small and medium-sized businesses with more than 210 billion won this year.”

Meanwhile, SKC invested 85 billion won in the production of fluorinated polyimide, one of Japan's three major export-controlled items, and is currently producing prototypes at a new plant completed at the end of last year.