‘플라즈마 제어’ 키워드 기사 1 articles
ACM Ships First SiCN Deposition Equipment… Expanding Support for Advanced BEOL and Packaging Processes
ACM Research shipped its first PECVD SiCN system targeting advanced semiconductor back-end-of-line and packaging processes to a major semiconductor ma…
2026.05.20 by 명세환 기자