‘반도체 노광 공정’ 키워드 기사 2 articles
Gigaphoton Develops Neon Gas Recycling System for ArF Excimer Lasers...Achieves 50% Recycling Rate
Gigaphoton announced that it has developed a gas recycling system for ArF excimer lasers and achieved a 50% neon gas recycling rate.
2026.10.02 by 배종인 기자
UNIST Develops Next-Generation EUV Photoresist Design Technology...Customizable Sensitivity and Precision Control
A research team led by Professor Jang Ji-hyun from the Department of Energy and Chemical Engineering at UNIST has developed a technology to control th…
2026.09.21 by 배종인 기자