‘가스 재활용률 50%’ 키워드 기사 1 articles
Gigaphoton Develops Neon Gas Recycling System for ArF Excimer Lasers...Achieves 50% Recycling Rate
Gigaphoton announced that it has developed a gas recycling system for ArF excimer lasers and achieved a 50% neon gas recycling rate.
2026.10.02 by 배종인 기자