Collaboration with Microelectronics Research Institute and Albac
LiF Established for Adoption of Piezoelectric MEMS in New Applications
First wafer production expected in Q2 2021, with mass production expected in late 2022.


STMicroelectronics (ST) announced today that it will collaborate with the Microelectronics Research Institute of A*STAR (A*STAR), the Agency for Science, Technology and Research in Singapore, and Alvac, a leading Japanese manufacturing tool supplier, to jointly establish and operate an 8-inch (200nm) R&D line focused on piezoelectric MEMS technology.
This collaboration will strengthen ST Singapore's manufacturing process portfolio and accelerate the adoption of piezoelectric MEMS actuators in emerging application areas. These include MEMS mirrors for smart glasses, AR headsets and LiDAR systems, Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) for emerging medical applications, and Piezo Heads to support commercial and industrial 3D printing.

This is the world's first 'LiF (Lab-in-Fab)' R&D line, which promotes innovation by combining advanced technologies in piezoelectric materials, piezoelectric MEMS technology, and wafer-fab tools to develop new materials and process technologies into products for industrial customers.

This LiF will bring together tools and dedicated personnel from three organizations, including MEMS R&D and process scientists and engineers.

IME will contribute to line development, leveraging its expertise and industrial drive in piezoelectric MEMS device design, process integration, and system integration. IME will also provide cutting-edge tools to ensure a seamless, centralized workflow throughout the entire product production process.

The new R&D line will leverage existing ST personnel and benefit from economies of scale through the ST wafer fab located on the same campus.

“LiF will give our customers the ability to more easily move from feasibility studies to product development and volume production,” said Benedetto Vigna, President of ST’s Analog, MEMS and Sensors Group.

Meanwhile, the LiF facility is expected to produce its first wafers in the second quarter of 2021 and be ready and operational for mass production in 2022.