IntelliGen MV is a solution that combines the proven IntelliGen Mini and IntelliGen HV dispensing systems with solutions optimized for 3D semiconductor and MEMS applications to ensure high-purity filtration technology and reproducibility in medium-viscosity liquid dispensing.

Todd Edlund, Chief Operating Officer at Integris, stated, "As 3D semiconductor and MEMS technologies advance, there is a growing trend among manufacturers to require high-speed throughput and high-purity filtration capabilities to match complex processes. Each application requires intensive real-time management functions as well as interactive diagnostics and feedback capabilities." "The IntelliGen MV medium-viscosity liquid injection system reduces failure rates, simplifies recipe programming, and improves the priming speed of liquid filtration filters through new and diverse diagnostic and detection functions," he said.

Thanks to its compact design, the IntelliGen MV injection system allows multiple units to be installed on a single track, enabling the simultaneous processing of various photochemicals ranging from 100 to 300 cP to maximize filter filtration performance and efficiently utilize the internal space of the equipment.

Various Integris solutions for gaseous and liquid contamination control and wafer contamination control, including the new IntelliGen MV injection system, are scheduled to be demonstrated at the Semicon Korea 2015 exhibition held at COEX in Seoul from February 4 to 6, 2015.