Wooptix, an innovative company in the semiconductor metrology field, has unveiled its new inline metrology system, Phemet®, which delivers industry-leading speed and resolution, optimizing large-scale inline measurements in next-generation semiconductor processes.

Uptics announced that it will be introducing its new inline measuring system, Phemet®, at SEMICON Europa (Booth B1679), held in Munich, Germany from November 18th to 21st.

The system captures more than 16 million data points per second with subnanometer (less than 1 nm) resolution, enabling precision measurements in advanced memory, logic devices, and hybrid packaging processes.

“As semiconductor manufacturing becomes increasingly miniaturized and complex, Phemet® will contribute to strengthening process control and increasing yield in mass production environments,” said Uptics.

Phemet® measures the shape, nanotopography, warpage and twist of an entire wafer in a single image.

This product provides an ultra-high resolution of 4,700 x 4,700 pixels and can measure blank, patterned, and bonded wafers.

SpecialIt is optimized for large-scale in-line measurement in next-generation semiconductor processes such as hybrid bonding, backside power supply logic, 3D NAND, and HBM.

Uphtics uses its proprietary wavefront phase imaging (WFPI) technology to capture the light distribution on the wafer and builds a phase map using its own algorithm.

This allows for ultra-high-speed acquisition of sub-nanometer-level wafer topography.

“As semiconductor manufacturing evolves toward 3D integration and ultra-fine processes, the importance of wafer shape measurement is growing,” said Risto Puhaka, manager at semiconductor market analysis firm TechInsights. “High-speed, high-resolution metrology plays a key role in reducing process control costs and minimizing overlay errors.”

Uptix has already tested Phemet® with global semiconductor companies and plans to supply it to key customers soon.

The company has raised over $35 million in funding from Samsung Venture Investment, Intel Capital, and TEL Venture Capital. Phemet® is expected to be available for demonstration in November 2025.