On the 26th, the latest cleaning solution was announced at a press conference.

SEMICON Korea 2016, an exhibition of cutting-edge semiconductor manufacturing technology, will be held for three days from the 27th to the 29th at COEX in Samseong-dong, Seoul. This exhibition, the largest semiconductor-related exhibition in Korea, is in its 29th year and opened with the theme of 'Connect to the Future, Market, Technology, and People.'

With over 530 companies, including those in the semiconductor equipment and materials industry, participating at a record high, 1,870 booths were set up, showcasing the latest semiconductor process technologies, equipment, materials, and special gases.

Among them, Entegris, a company that provides yield-enhancing materials and solutions used in semiconductor and other high-tech industries, participated in this exhibition.

Entegris studies the properties and uses of materials commonly used in key technology products, including polymers, metals, semiconductors, graphite, silicon carbide, and ceramics, and uses technologies to separate, purify, and analyze complex mixtures of organic and inorganic compounds, enabling customers to precisely control particulate contamination.

Meanwhile, on January 27, Entegris held a press conference to announce its Post-CMP cleaning solution for advanced semiconductor manufacturing and its PlanarClean ^® AG product, which is suitable for copper and tungsten processes below 10 nm.