Strengthening leadership in sub-7nm advanced process technology by establishing EUV production lines
We will contribute to the national economy through various mutually beneficial cooperation with related industries.

Samsung Electronics held a groundbreaking ceremony for the 'Samsung Electronics Hwaseong EUV Line' at its Hwaseong campus in Gyeonggi Province and has begun full-scale construction of the line. It is scheduled to be completed in the second half of 2019, followed by trial production, and will begin full-scale operation in 2020.

With the full-scale introduction of EUV (Extreme Ultra Violet) equipment—essential for overcoming the limitations of microfabrication processes—into this new line, it is expected to play a key role in Samsung Electronics maintaining its leadership in semiconductor microfabrication technology in the future.

The semiconductor industry has increased integration density and implemented fine circuits through process miniaturization, improving the performance and power efficiency of semiconductors. However, as miniaturization has recently progressed to single-digit nanometer scales, the introduction of EUV equipment with shorter wavelengths than conventional ArF (argon fluoride) light sources is necessary to implement more intricate circuits.

When EUV technology is fully commercialized, it can improve the performance and power efficiency of semiconductors, as well as reduce the number of process steps for circuit formation, thereby dramatically increasing productivity.



Samsung Electronics plans to use its Hwaseong EUV line to respond promptly to future demand in the advanced semiconductor market, which requires high performance and low power consumption for mobile, server, network, and HPC, and to lead the market for 7nm and smaller foundry advanced processes.

The initial investment for the Hwaseong EUV line is set at $6 billion by 2020, including construction costs, and Samsung Electronics plans to pursue additional investments depending on market conditions after the line begins operation.

The mutual growth between Samsung Electronics and Hwaseong City, which began with the development of the Samsung Electronics Hwaseong Campus in 2000, is expected to expand further with the construction of this new EUV line, solidifying its position as a mecca for the advanced semiconductor industry.

In his commemorative speech, Kim Ki-nam, President and Head of Samsung Electronics’ DS Division, stated, "With the establishment of this new EUV line in Hwaseong, the Hwaseong Campus will become the center of the semiconductor cluster connecting Giheung, Hwaseong, and Pyeongtaek," and added, "Samsung Electronics will contribute to the national economy through various win-win collaborations with academia, research institutes, and related industries."