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Samsung Electronics Establishes Mass Production System for 1st Generation 10nm-Class EUV DRAM
Published2020.03.25 08:422021 DDR4/LPDDR4X Market Transitions to DDR5/LPDDR5
Samsung Electronics has presented a new paradigm to break through the limitations of semiconductor microfabrication by becoming the first in the memory industry to fully apply the EUV process to its next-generation DRAM products.
▲ 10nm-class DRAM module <Image=Samsung Electronics>
Samsung Electronics announced on March 25 that it has completed evaluations by global customers while supplying more than 1 million first-generation (1x) 10-nanometer-class DDR4 (Double Data Rate 4) DRAM modules produced using the EUV process.
Applying EUV lithography technology can reduce the multi-patterning process, which involves repetitive circuit etching, while increasing patterning accuracy; this contributes not only to improved performance and efficiency but also to a reduction in product development time.
Currently, Samsung Electronics is developing mass production technology for 4th generation 10-nanometer class (1a) DRAM in the early 14-nanometer range using the EUV process, and plans to improve the quality and yield of next-generation products beyond those of existing process products.
The 4th generation 10-nanometer class (1a) DRAM made using EUV doubled the productivity per 12-inch wafer compared to the 1st generation 10-nanometer class (1x) DRAM.
Samsung Electronics plans to introduce a 4th generation 10nm-class with further improved performance and capacity in 2021.(1a) We plan to strengthen our technological leadership in the premium memory market by mass-producing DRAM (DDR5, LPDDR5) and developing 5th and 6th generation DRAMs in advance.
In addition, in line with the full-scale expansion of the DDR5/LPDDR5 DRAM market, we plan to strengthen technological cooperation with global IT customers and actively promote inter-company standardization activities to increase the adoption rate of new products in next-generation systems.
▲ Samsung Electronics Hwaseong Plant <Image=Samsung Electronics>
Meanwhile, Samsung Electronics plans to establish a mass production system capable of stably responding to the growing demand for next-generation premium DRAM by operating the new Pyeongtaek line in the second half of this year.
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