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ASML Fire, EUV Supply Disruption

Google 우선 소스Published2022.01.10 11:23
Partial Fire Impact on Wafer Clamp Production Equipment
Possibility of Delayed Adoption by Samsung Electronics and SK Hynix


A fire at ASML's facility has caused damage to EUV equipment production facilities, increasing the likelihood of partial delays in EUV equipment adoption by Samsung Electronics and SK Hynix.

ASML announced that a fire occurred at its Berlin plant on the 3rd, causing disruptions to some production facilities.

The fire occurred in a portion of one production building at the Berlin site.

Production has already resumed in a portion of that building, and the other buildings are operating normally without fire damage.

According to the initial investigation results announced on the 7th, metrology and inspection output plans do not include components manufactured in Berlin, so there is no impact.

Some impact occurred on DUV component production, but no impact is expected on DUV production and sales.

Regarding EUV equipment, some of the production facilities for the wafer clamp, which is an EUV system module, were affected by this fire.

The company stated that it is currently establishing a recovery plan to minimize potential impacts to customers for both EUV production volume and service.

In relation to this, since ASML is the sole supplier of EUV lithography equipment to Samsung and SK Hynix, it is expected to impact the domestic semiconductor industry.

South Korea accounted for 44% of ASML equipment adoption in the first quarter of 2021 and 39% in the second quarter.

In particular, South Korea imports the most EUV equipment in the world along with Taiwan.

According to foreign media, ASML's EUV equipment lead time is 12 to 18 months, and if there are disruptions in reproduction, this could be longer.

Additionally, there is an increasing possibility that ASML will procure parts from other factories, so EUV supply disruptions could be recovered in the near term.

In the domestic semiconductor industry, Samsung Electronics recently deployed EUV equipment in mass production of 14-nanometer DDR5 DRAM, improving productivity by 20%, and is also deploying EUV equipment in the latest 5-nanometer foundry process.

Additionally, Samsung Electronics' equipment order timing for the Pyeongtak P3 facility is expected to occur between the first and second quarter of this year, so the possibility of disruptions cannot be ruled out.

EUV equipment is used in advanced processes.

With the recent intense competition in semiconductor cutting-edge technology, some anticipate that this accident will also cause disruptions to cutting-edge process technology development.

Regarding this accident, ASML mentioned that it will provide detailed information about the fire situation in its 2021 financial results and 2022 outlook announcement to be released on January 19th.
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