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TEMC Launches Full-Scale Eco-Friendly Innovation in Semiconductor Etching with Localized Low-Carbon HFO Production

Google 우선 소스Published2025.07.08 08:00

Officials of the Semiconductor Industry Carbon Neutrality Grand Consortium, including TEMC, are posing for a commemorative photo.

Ministry of Trade, Industry and Energy R&D Support Continues Evolution of ESG-Specialized Materials Companies
Aiming to invest 30 billion won by 2030 and secure a leading position in the global market

TEMC Co., Ltd. continues to evolve into an ESG-specialized materials company by embarking on the development of low-carbon hydrofluoroolefin (HFO) materials.

TEMC announced that it is participating in the 'Carbon Neutral Industrial Core Technology Development Project' organized by the Ministry of Trade, Industry and Energy and the Korea Institute of Industrial Technology Planning and Evaluation, and is currently developing technology to localize HFO (Hydro-fluoro-olefin) compounds, which are materials used in semiconductor etching processes to reduce GWP (Global Warming Potential).

The government announced the phased reduction of HFCs (hydrofluorocarbons) by the end of 2024 and decided to actively support the transition to eco-friendly alternatives, and the key project resulting from this is TEMC's HFO localization project.

HFOs are gaining attention as semiconductor etching gases due to their extremely low global warming potential compared to conventional CFCs (chlorofluorocarbons) and HFCs, but supply chain instability is severe as the country relies entirely on imports.

TEMC aims to establish a stable supply base for the semiconductor industry by jointly developing full-process technologies, ranging from HFO synthesis to purification and filling, with Sungkyunkwan University and the Korea Research Institute of Standards and Science.
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TEMC will invest a total of over 30 billion won in research and development and production facilities from 2025 to 2030 to complete the entire line of Low-GWP HFO compounds.

Specifically, it will proceed with the development of HFO synthesis technology and the construction of a pilot plant, the introduction of high-purity HFO purification and analysis equipment, the establishment of an automated system for filling and packaging HFO for semiconductors, and the development of real-time monitoring solutions to respond to safety and environmental regulations.

The domestic market size is approximately $100 million (130 billion won) as of 2023, and the global market is projected to grow at an average annual rate of 18.2% from $2.5 billion in 2021 to $11.2 billion in 2028.

If TEMC succeeds in development, it will lay the groundwork to preempt the entire market, along with the effect of replacing domestic imports.

Based on its experience in localizing supply chain-unstable gases such as neon (Ne), diborane (B₂H₆), and deuterium (D₂), TEMC expressed its ambition to establish itself as a leader in the eco-friendly HFO market through this project.

"A TEMC official stated, 'Based on the synthesis and purification technologies secured through the execution of numerous government projects, we will maximize our competitiveness in the HFO market and breathe new vitality into the domestic eco-friendly materials industry through government support and industry-academia collaboration.' The official added, 'We express our deep gratitude to the Ministry of Trade, Industry and Energy and the Korea Institute of Industrial Technology Planning and Evaluation for their unwavering support and cooperation in creating this opportunity.'"

This project is a business that embodies TEMC's technological capabilities and ESG management philosophy as a company specializing in semiconductor specialty gases.

In addition to the semiconductor etching process, it is applied to eight major processes including photolithography, ion implantation, and deposition/diffusion. By supplying environmentally friendly HFOs, it is expected to contribute to achieving the domestic semiconductor industry's carbon neutrality goals.
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