With the ultra-miniaturization of semiconductor processes and the expanding use of isotope materials in the display, medical, and quantum computing fields, TEMC is launching a full-scale business expansion based on its related production and supply technologies.

TEMC announced on the 27th that it is purifying deuterium (D2) for semiconductor processes to an ultra-high purity level and supplying it in mass production for the annealing process, and that it has also started supplying the P-type dopant 11BF3 (boron trifluoride) to major memory customers not only in Korea but also overseas by producing it in a customized manner.

TEMC announced that it laid the foundation for the isotope business by localizing proton ion exchange membrane technology for deuterium (D2) for the first time in Korea in 2023.

The company explained that while hydrogen was primarily used in the annealing process in the past, the use of deuterium is increasing in ultrafine processes in terms of device lifespan and process characteristics.

In addition, citing forecasts from global market research firms, it was stated that the deuterium market is expected to reach $670 million by 2029, showing growth driven by industrial advancement.

Regarding 11BF3, it is a P-type dopant used in the semiconductor silicon wafer doping process, and it was added that the supply range is being expanded through production tailored to customer requirements.

TEMC announced that it has enhanced safety features by applying its patented technology, the SCV (Safety Block Cylinder Valve), during the 11BF3 supply process.


According to the company, the SCV has a structure that integrates a filter, regulator, and valve, enabling precise pressure control. It is designed to reduce the possibility of gas leakage by ensuring that fluid flows only in a vacuum state, which is a semiconductor process condition.

TEMC announced that it is expanding the application scope of its radioisotope technology beyond semiconductors to fields related to displays, pharmaceutical and medical inspection equipment, and quantum computers.

It was stated that heavy water (D2O) is being used in core processes to improve luminous efficiency and lifespan in the display field, and it was explained that it is also being applied in various forms in the medical field.

In addition, TEMC announced that it is preparing for product commercialization by developing isotope-related technologies, such as high-purity D2O purification technology and C6D6 synthesis technology, through the expanded application of its heavy water (D2O) production technology.

They stated that, regarding the field of quantum computing, the role of isotope technology is expected to grow due to the importance of controlling the internal physical properties of materials, and they plan to strengthen their position as an essential materials partner based on related source technologies.

Along with this, TEMC announced that it is also preparing to expand its new product lineup, including 72GeH4 (germanium hydride) using SCV.

"With the introduction of 3D DRAM and sub-2 nanometer processes, the importance of isotopes that control the electrical properties of semiconductors is higher than ever," said a TEMC official. "As isotopes are classified as 'essential materials' across various next-generation industries beyond semiconductors, we will leap forward as a key partner in the global materials supply chain through a diversified business portfolio."