Providing a diverse portfolio of semiconductor materials to improve yield
Announcement of Gas Purification System Platform to Improve Yield of Advanced Semiconductors and LEDs

We are a yield provider.

Entegris, a provider of specialty chemicals and advanced material processing solutions for the electronics industry, emphasizes that it is a company that contributes to improving the yield of semiconductor companies.

This is because increasing yield is crucial in semiconductor production lines, as a higher yield implies higher productivity. Therefore, the company emphasizes that it provides materials and solutions to enhance yield in state-of-the-art manufacturing environments through its extensive technological capabilities.


Hong Wan-cheol, President of Integris Korea

The problem is that there are limits to increasing yield in increasingly finer manufacturing processes, and the role of specialty material companies like Integris is becoming more significant. Hong Wan-cheol, President of Integris Korea, stated, "The factors determining yield lie in the manufacturing environment and equipment." He continued, "However, as these elements have reached their limits in processes below 30 nanometers, components, chemicals, and materials have now become critical factors in improving yield. In this regard, yield can only be increased by inspecting and correcting defects and controlling them through advanced materials."

In other words, as the process becomes finer than 14nm, it means that the yield must be increased using special materials to overcome the limitations of invisible, so-called 'black box' inspections. To improve this 'invisible yield,' Integris provides key chemicals, filtration and purification, and material management products for the seven major semiconductor processes, ranging from injection, lithography, deposition, dry etching, wet cleaning, CMP, and manufacturing facilities.

Specifically, the development projects provided by Integris include product lines such as photochemical bulk filtration, boron mixtures for injection, solid precursors for deposition, special coatings for critical applications, and CMP pad conditioners.

Regarding the assurance of purity within the supply chain, which is a critical factor due to the nature of specialty materials, President Hong Wan-cheol stated, “We have secured solutions that guarantee photochemical purity from production to consumption, including manufacturing, transportation, inventory, subfab cycle times, and tool cycle times,” adding, “We are satisfying PPQ to meet demanding levels of purity.” PPQ (Pars per quadrillion) is equal to the probability of finding one minnow in the entire San Francisco Bay Area.

Integris Korea currently has 200 employees working in 4 offices and is equipped with manufacturing facilities such as the Wonju plant (products for fluid management), the Korea Technology Center (KTC), and the Jangan plant.

▲ Gas Purification Platform GateKeeper® Gas Purification Systems (GPS)

In particular, the GateKeeper® Gas Purification Systems (GPS) product family produced at the Jang-an plant is attracting attention as a new advanced gas purification platform that improves wafer yield in semiconductor and LED applications.

The new GateKeeper GPS product family utilizes new purification media to provide best-in-class gas purity across a wider flow rate range while reducing the required equipment space. With expanded manufacturing capabilities in Korea, Integris now produces GateKeeper GPS systems in North America and Asia.

Semiconductor processes and LED manufacturing requirements for advanced nodes demand higher purity to remove defect-causing contaminants found in process gases. This group of systems removes various contaminants in gas streams to the part-in-trillion level and purifies gases such as CDA, N2, H2, H2 for EUV, Ar, and NH3.

The company stated that thanks to the more compact system, customers can allocate the reduced space to other necessary tools or increase the purification flow rate with an additional system. You can check out Integrys products (Hall D, Booth 5504) in person at the SEMICON Korea exhibition, which runs until the 10th.