XCEDE, Extending Product Life Cycles in Harsh Semiconductor Processes

Edwards Korea (www.edwardsvacuum.com), which recently introduced a new anti-corrosion coating technology for core components of vacuum pumps, participated in the SEMICON Korea exhibition held until the 10th and introduced the related technology.

As a specialist manufacturer of vacuum and gas handling solutions, Edwards provides core technologies for vacuum pumps used in harsh and corrosive semiconductor manufacturing processes.

The company said that the improved corrosion resistance achieved through its new corrosion prevention technology, XCEDE, will ultimately reduce product downtime and extend product life cycles to a revolutionary level.

▲ EZENITH

“XCEDE is a new technology that demonstrates Edwards’ differentiated solutions that address customer challenges with a high level of application knowledge and innovative approach,” said Lee Sung-min, CEO of Edwards Korea. “With this technology, we have been able to extend the pump life cycle to a revolutionary level and even prevent unexpected product failures.”

Harsh etching, cleaning and deposition processes in semiconductor and flat panel display manufacturing are performed at high temperatures and with corrosive substances, and the internal components of vacuum pumps that rotate in tight spaces at very high speeds in these environments are exposed to high levels of corrosion. Additionally, conventional chemical or electrochemical coating processes are difficult to control and are prone to corrosion and wear.

XCEDE is a newly installed electronically automated dual coating solution in our state-of-the-art Cheonan manufacturing plant. Through extensive testing, we have proven the durability and product life extension capabilities of our XCEDE coating solution.

These XCEDE coating solutions will be applied to the production of the new iXM and iXH pump series, but can also be applied to and upgraded from existing products.

Introducing a number of pump products that reduce the environment and maintenance costs

In addition to XCEDE coating solutions, Edward Korea will be showcasing the following products at this exhibition:


▲ iXM1200 MK2

The iXM MK2 is designed for eco-friendly production, and its energy-efficient pumping mechanism reduces power consumption by 43% compared to conventional dry pumps, contributing significantly to the environment and reducing maintenance costs. The iXL200 is also an ultra-compact, ultra-light product that can be used in load-lock and clean applications, and reduces the environment and maintenance costs through its low-power function. The iXA 4506 is an “all-in-one” solution for large, high-flow applications such as semiconductors, FPDs, LEDs, and solar manufacturing. It is an ultra-miniaturized, integrated turbo molecular pump with modularized control and AC/DC power supply.

The EZENITH system is a product line that has been further improved from the existing Zenith line in terms of pumping and gas treatment technology, and is capable of processing all hazardous substances emitted during the entire process. In addition, environmental safety management has been maximized by integrating the dry pump and gas treatment device into a single management unit.