With the 3-nanometer era of semiconductors dawning, the battle over ultra-fine processes is intensifying to develop 2- to 1-nanometer products predicted to appear after 2025. Samsung Electronics has strengthened its R&D investment in cooperation with ASML.

ASML announced on the 12th (local time) that it will invest 1 trillion won in establishing a 'Next Generation Semiconductor Manufacturing Technology R&D Center' to jointly develop next-generation EUV-based ultra-fine processes in cooperation with Samsung Electronics.

According to the Presidential Office, the R&D center to be established in Korea through this cooperation MOU marks the first time that ASML, an equipment manufacturer, has established an overseas R&D center to jointly develop semiconductor manufacturing processes with a semiconductor manufacturer.

SK Hynix signed an MOU with ASML for the development of hydrogen gas recycling technology for EUV. If hydrogen inside EUV equipment is recycled instead of burned, electricity consumption is expected to decrease by 20% and annual costs are expected to be reduced by 16.5 billion won.

In addition, the Ministry of Trade, Industry and Energy signed an MOU with the Dutch Minister for Trade and Development Cooperation to establish the 'Korea-Netherlands Advanced Semiconductor Academy.' Once the academy is established, Korean semiconductor students and professionals will have access to educational opportunities provided by ASML headquarters as well as Eindhoven University of Technology. It is expected that this will enable them to develop know-how in operating advanced equipment, such as EUV, and enhance their capabilities in related technology development.


This MOU was signed during the government's visit to the Netherlands and ASML headquarters, accompanied by Samsung Electronics Chairman Lee Jae-yong and SK Group Chairman Chey Tae-won.

The signing ceremony for the Korea-Netherlands advanced semiconductor cooperation agreement, held at ASML headquarters, was attended by government officials from both countries, the King of the Netherlands, ASML CEO Peter Wennink, IMEC CEO Luke van den Hove, and Germany's Zeiss SMT President Andreas Fetzer.