Gigaphoton Develops Neon Gas Recycling System for ArF Excimer Lasers...Achieves 50% Recycling Rate
Published2026.10.02 14:57Annual Gas Consumption Reduction of Up to 470 kL, Compatible with Up to 5 ArF Lasers
Gigaphoton has developed a gas recycling system for ArF excimer lasers used in semiconductor exposure processes, strengthening the stability of rare gas supply.
Gigaphoton announced on the 1st that it has developed hTGM for ArF, an on-site neon gas recycling system for ArF excimer lasers.
ArF lithography is a key process technology used in advanced semiconductor production, and stable supply of neon gas required for laser operation is critical. Recently, as geopolitical risks and supply chain instability have increased volatility in neon gas supply and demand, the semiconductor industry has shown growing interest in consumption reduction and recycling technologies.
Achieves 50% Neon Gas Recycling Rate
hTGM for ArF is a system that recovers and recycles gases used in semiconductor manufacturing facilities.
The company announced that it has achieved a 50% neon gas recycling rate through this technology. Additionally, based on a single system, it can reduce annual gas consumption by up to 470 kiloliters (kL), and can be operated connected to up to 5 ArF excimer laser equipment.
Gigaphoton has previously provided gas reduction and recycling solutions for KrF excimer lasers, and through this development has expanded the application scope of related technologies to the ArF lithography field.
Expected to Strengthen Semiconductor Supply Chain Stability
The company expects that by combining gas consumption reduction technology with on-site recycling systems, it can reduce rare gas procurement risks and enhance production stability for semiconductor manufacturers.
In particular, since neon gas is an essential rare gas used in semiconductor exposure processes, securing response capabilities to supply chain volatility is important.
Gigaphoton plans to contribute to strengthening supply chain stability and sustainability in the semiconductor industry through development of advanced laser technologies and environmentally friendly solutions in the future.
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