The background to the 600 million won lawsuit between Kokusai and Eugene Tech: The future battle for ALD market.
Published2024.03.08 10:10Japanese semiconductor equipment manufacturer Kokusai Electric has filed a patent infringement lawsuit against domestic semiconductor equipment company Eugene Tech on the 5th of last month regarding four patents. Kokusai cited the Harrier-L, a batch-type atomic layer deposition (ALD) equipment that processes 150-wafer loads, and the Harrier-M, an ALD equipment that processes a smaller number of wafers, as representative infringing equipment.
Related news
ACM Launches New ALD Furnace Products
Thermal atomic layer deposition (thermal ALD) is a rapidly growing technology in advanced node processes, and as logic nodes continue to shrink, semiconductor manufacturers are intensifying their efforts to secure the latest equipment necessary for advanced processes. Against this backdrop, ACM Research has demonstrated its technological prowess by shipping advanced process equipment.
2022.10.14by 명세환 기자
ASM, $100 million investment in Mars 2nd Manufacturing Research Innovation Center begins in earnest
ASM, a global semiconductor company from the Netherlands, is investing $100 million in Hwaseong, Gyeonggi Province, to expand its R&D and manufacturing facilities, and is entering full-scale operations to expand the supply of PEALD used in advanced semiconductor processes.
2023.05.23by 배종인 기자
Merck, Innovative ALD OLED Material 100x More Reliable Than Conventional Ones
Merck's recently developed innovative ALD (Atomic Layer Deposition) material won the "Display Component of the Year Award" at the Society for Information Display (SID), the world's largest display conference, last week.
2023.05.31by 배종인 기자
Two-dimensional semiconductors are made by stacking one layer at low temperatures.
UNIST has developed a thin film deposition process method in which tellurium atoms are regularly arranged at a low temperature of 50 degrees Celsius using atomic layer deposition (ALD).
2023.08.03by 배종인 기자
Japanese semiconductor equipment company Kokusai Electric sues Korea's Eugene Tech
Kokusai Electric and Eugene Tech Co., Ltd., competitors in the domestic semiconductor equipment market, have faced off in court. Eugene Tech, which has been sued for patent infringement, is known to have previously succeeded in product development through design-around techniques with support from the Korean Intellectual Property Office, raising concerns about the potential ramifications of this litigation.
2024.02.05by 권신혁 기자
