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The background to the 600 million won lawsuit between Kokusai and Eugene Tech: The future battle for ALD market.
Published2024.03.08 10:10일본 반도체 장비기업 코쿠사이 엘렉트릭(이하 코쿠사이)이 국내 반도체 장비기업 유진테크에 지난달 5일 특허권 4건에 대한 침해소송을 제기했다. 코쿠사이는 150장 웨이퍼를 처리하는 배치(Batch)식 원자증착장비(ALD) Harrier-L과 그보다 적은 수의 웨이퍼를 처리하는 ALD 장비 Harrier-M을 대표적인 침해장비로 제시했다.
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