The background to the 600 million won lawsuit between Kokusai and Eugene Tech: The future battle for ALD market.
Published2024.03.08 10:10Japanese semiconductor equipment manufacturer Kokusai Electric has filed a patent infringement lawsuit against domestic semiconductor equipment company Eugene Tech on the 5th of last month regarding four patents. Kokusai cited the Harrier-L, a batch-type atomic layer deposition (ALD) equipment that processes 150-wafer loads, and the Harrier-M, an ALD equipment that processes a smaller number of wafers, as representative infringing equipment.
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